Production area of Liuzhou Steel Gas Company.

On September 25, reporters learned from Guangxi Liuzhou Steel Gas Co., Ltd. (hereinafter referred to as “Liuzhou Steel Gas Company”) that its subsidiary has, for the first time, supplied self-produced ultra-high-purity liquid oxygen with a purity of 99.9999% to a leading semiconductor company, successfully entering the high-end market.

It is noted that liquid oxygen is the liquid form of oxygen. In semiconductor manufacturing, its strong oxidizing property is primarily used to remove organic and inorganic contaminants from wafer surfaces. It is also used in the thermal oxidation process of chip manufacturing to form an oxide layer on silicon wafers.

"The purity of liquid oxygen directly affects semiconductor product yield and device performance stability. Therefore, the semiconductor industry has extremely high requirements for its purity." Ling Bo, General Manager of Liuzhou Steel Gas Company, explained that the company's self-produced ultra-high-purity liquid oxygen has a purity of 99.9999% (6N), with total impurities below 1 ppm (part per million). This means the total impurity content is controlled below one-millionth, with key impurities like nitrogen, argon, and methane controlled below 50 ppb (parts per billion), surpassing similar domestic and international products.

Behind this achievement lies the Liuzhou Steel Gas Company's efforts in focusing on technological innovation, continuously breaking through technical bottlenecks, and steadfastly pursuing a high-end product development path.

Ling said the company began dedicated R&D on high-end products like ultra-high-purity liquid oxygen in 2023. By adopting a combined process of "deep freezing + adsorption purification", it achieved mass production of ultra-high-purity liquid oxygen.

Beyond ultra-high-purity liquid oxygen, the Liuzhou Steel Gas Company has achieved a series of results in rare gas R&D, forming a product cluster of high-purity krypton, xenon, neon, helium gases and ultra-high-purity liquids, widely used in semiconductors, aerospace, nuclear power, and other fields.

Ling stated that the company will continuously enhance production capacity and supply chain resilience while expanding in domestic and international markets. It will also increase R&D investment to drive innovation in rare gases, ultra-high-purity gases, and gas mixtures, venturing into emerging fields like new materials and new energy.